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November 1, 1992Journal of Applied Physics

Continuum modeling of radio-frequency glow discharges. I. Theory and results for electropositive and electronegative gases

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ΕGΕvangelos GogolidesHSHerbert H. Sawin

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Gogolides et al. (1992) studied this question.

synapsesocial.com/papers/6a70973e26a7f98052dd11f2https://doi.org/10.1063/1.352250
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