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September 1, 1993Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Novel radio-frequency induction plasma processing techniques

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Authors

JKJohn H. KellerAustralian National UniversityJFJohn ForsterIBM (United States)MBMichael BarnesUniversity of Oxford

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Keller et al. (1993) studied this question.

synapsesocial.com/papers/6a82fb2df2457b8164efdcfehttps://doi.org/10.1116/1.578597
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