Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
July 1, 1993Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Transformer coupled plasma etch technology for the fabrication of subhalf micron structures

View Full Paper
Ask AI
Bookmark
Share

Authors

JCJ. B. CarterLam Research (United States)JHJohn HollandScotland's Rural CollegeEPEric A. PeltzerLam Research (United States)

Discussion

Loading...

Member takes

Implication

Key Points

Key points are not available for this paper at this time.

Cite This Study

Carter et al. (1993) studied this question.

synapsesocial.com/papers/6a82fb2df2457b8164efdcffhttps://doi.org/10.1116/1.578543
View Full Paper
Ask AI
Bookmark
Share