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May 24, 1993Applied Physics Letters

Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow discharge

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Authors

MBMichael BarnesUniversity of OxfordJFJohn ForsterIBM (United States)JKJohn H. KellerAustralian National University

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Barnes et al. (1993) studied this question.

synapsesocial.com/papers/6a82fb2df2457b8164efdd01https://doi.org/10.1063/1.109265
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