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September 13, 2012Journal of Physics D Applied PhysicsOpen Access

Control of the ion flux and ion energy in CCP discharges using non-sinusoidal voltage waveforms

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Authors

TLTrevor LafleurUNSW SydneyJBJean‐Paul BoothCentre National de la Recherche Scientifique

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Lafleur et al. (2012) studied this question.

synapsesocial.com/papers/6a82fb6d67735c513e7d57dfhttps://doi.org/10.1088/0022-3727/45/39/395203
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