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July 1, 1993Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Dry and wet etching characteristics of InN, AlN, and GaN deposited by electron cyclotron resonance metalorganic molecular beam epitaxy

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Authors

S. J. PeartonS. J. PeartonUniversity of StuttgartCAC. R. AbernathyUniversity of FloridaFRF. RenLinköping University

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Pearton et al. (1993) studied this question.

synapsesocial.com/papers/6a830a5524ad758e22e8e245https://doi.org/10.1116/1.578423
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