Bent-beam electrothermal actuators-Part II: Linear and rotary microengines

For Part I see L. Que, J.S. Park and Y.B. Gianchandani, ibid., vol.10, pp.247-54 (2001). This paper reports on the use of bent-beam electrothermal actuators for the purpose of generating rotary and long-throw rectilinear displacements. The rotary displacements are achieved by orthogonally arranged pairs of cascaded actuators that are used to rotate a gear. Devices were fabricated using electroplated Ni, p/sup ++/ Si, and polysilicon as structural materials. Displacements of 20-30 /spl mu/m with loading forces >150 /spl mu/N at actuation voltages200 /spl mu/N at displacements >100 /spl mu/m were measured.