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NdFeB films are prepared by dc sputtering. The dependence of the film properties on sputtering parameters is investigated by analysing the surface morphology, crystalline structure, and magnetic properties for different preparation conditions. c-textured films are prepared with a coercivity of up to 0.2 T, a saturation polarization of 1.6 T, and a remanent polarization of 0.4 T. Special emphasis is given to the preparation conditions such that the surface roughness of films with sufficient magnetic performance is well below 100 nm, making these films suitable for micropatterning.
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Lemke et al. (1995) studied this question.
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