Answers are grounded in this paper and cite their sources.
In this paper hydrodynamic and kinetic approaches to model low pressure capacitively coupled radio‐frequency discharges are discussed. In particular approaches and results for power modulated discharges in a mixture of silane and hydrogen and for discharges containing a considerable amount of dust particles will be presented. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
No takes yet. Share an insight, caveat, or question.
Goedheer et al. (2004) studied this question.
Synapse has enriched 10 related papers. Consider them for comparative context: