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October 3, 1988Applied Physics Letters

Effects of low-frequency modulation on rf discharge chemical vapor deposition

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YWYuichiro WatanabeTokyo University of the ArtsMSMasaharu ShirataniKyushu UniversityYKY. KuboRitsumeikan University

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Watanabe et al. (1988) studied this question.

synapsesocial.com/papers/6a8351e3b95cf4e61630e3dahttps://doi.org/10.1063/1.100445
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