Growth Temperature Dependence of Boron Surface Segregation and Electrical Properties of Boron Delta-Doped Structures Grown by Si Molecular Beam Epitaxy

Reflection high-energy electron diffraction (RHEED) intensity oscillation showed a 4-monolayer (ML) period in the early stage of Si molecular beam epitaxy (MBE) on a 1 ML boron preadsorbed Si(111) surface, as long as the surface-segregated boron coverage was more than 1/3 ML. Temperature dependence of the boron surface segregation was investigated from the duration of the 4-ML-period oscillation. Effective solubility of boron in Si was one order higher than those reported for 1/3 ML boron preadsorbed cases. Crystallinity of the Si overlayer was satisfactory when the growth temperature was equal to or above 450° C, and 2/3 of the initially adsorbed boron atoms were confined to within about 10 ML (about 16 Å) of the Si overlayer at 450° C. Boron preadsorption was found to saturate at 1 ML, and the temperature dependence of the peak carrier concentration showed the same tendency as that of the effective solubility.