Geometrical analysis of the loss of ablation efficiency at non-normal incidence

A general method to analyze the loss of ablation efficiency at non-normal incidence in a geometrical way is provided. The model is comprehensive and directly considers curvature, system geometry, applied correction, and astigmatism as model parameters, and indirectly laser beam characteristics and ablative spot properties. The model replaces the direct dependency on the fluence by a direct dependence on the nominal spot volume and on considerations about the area illuminated by the beam, reducing the analysis to pure geometry of impact. Compensation of the loss of ablation efficiency at non-normal incidence can be made at relatively low cost and would directly improve the quality of results.