Answers are grounded in this paper and cite their sources.
Silicon micromechanical resonators are described which use a polysilicon resistor for both electrothermal excitation and piezoresistive sensing. By suitable design these devices may have a very low temperature coefficient of frequency and be used as both frequency references and pressure sensors.
No takes yet. Share an insight, caveat, or question.
Othman et al. (1987) studied this question.
Synapse has enriched 10 related papers. Consider them for comparative context: