The performance of a high-sensitivity secondary ion mass spectrometer is described. The spectrometer is used for studies of gas–surface interactions and operates under ultrahigh vacuum conditions with a mass-analyzed primary beam of low energy. The secondary ion detection system incorporates a retardation/acceleration energy analyzer with a large acceptance angle and a central stop which improves the signal/noise ratio. The analyzer emittance was designed to match the acceptance of a quadrupole mass filter. A calibration procedure is used to correct for the velocity discrimination of the quadrupole mass analyzer. Some applications to SIMS and to electron-induced desorption are illustrated.
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Dawson et al. (1977) studied this question.
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