Vacuum ultraviolet thin films 1: Optical constants of BaF_2, CaF_2, LaF_3, MgF_2, Al_2O_3, HfO_2, and SiO_2 thin films

The optical constants of MgF(2) (bulk) and BaF(2), CaF(2), LaF(3), MgF(2), Al(2)O(3), HfO(2), and SiO(2) films deposited on MgF(2) substrates are determined from photometric measurements through an iteration process of matching calculated and measured values of the reflectance and transmittance in the 120-230-nm vacuum ultraviolet wavelength region. The potential use of the listed fluorides and oxides as vacuum ultraviolet coating materials is discussed in part 2 of this paper.