What question did this study set out to answer?

To investigate whether applying the Richardson–Lucy bandwidth correction method to spectral reflectance data improves the accuracy of thin-film thickness characterization.

January 28, 2026MetrologiaOpen Access

Application of a bandwidth correction method to thin-film reflectance measurements

View Full Paper

Ask AI

Bookmark

Authors

ADAleksandr Aleksandrovich DanilenkoUniversity of Eastern Finland MRMasoud RastgouAalto University FMFarshid ManoocheriAalto University

Discussion

Member takes

Implication

Experimental study demonstrates improved thickness characterization accuracy in silicon dioxide thin films using Richardson-Lucy bandwidth correction, highlighting its reliability for reflectometry.

Key Points

To investigate whether applying the Richardson–Lucy bandwidth correction method to spectral reflectance data improves the accuracy of thin-film thickness characterization.
Examined a 2 μm-thick silicon dioxide (SiO2) layer on a silicon substrate across the 300 nm to 950 nm wavelength range.
Calculated reflectance spectra using MATLAB-based transfer-matrix software.
Applied the Richardson–Lucy deconvolution algorithm to correct spectral bandwidth distortions and performed sensitivity and uncertainty analyses.
Bandwidth-corrected reflectance data improved the characterization reliability of the SiO2 layer, particularly when estimating the width of the thickness distribution.
Sensitivity analysis and uncertainty evaluation demonstrated strong model sensitivity and confirmed the efficiency of the deconvolution method for resolving sharp spectral oscillations.

Cite This Study

Danilenko et al. (2026) studied this question.

synapsesocial.com/papers/6a8432f44d02f4f0268d738b https://doi.org/10.1088/1681-7575/ae3e94

View Full Paper

Ask AI

Bookmark

Implication

Experimental study demonstrates improved thickness characterization accuracy in silicon dioxide thin films using Richardson-Lucy bandwidth correction, highlighting its reliability for reflectometry.

Application of a bandwidth correction method to thin-film reflectance measurements

Discussion

Member takes

Implication

Key Points

Cite This Study

Application of a bandwidth correction method to thin-film reflectance measurements

Discussion

Member takes

Implication

Key Points

Cite This Study

Also Consider

Also Consider