Elemental mapping with about 1 nm spatial resolution has been achieved using a field emission transmission electron microscope (FE-TEM) equipped with an imaging filter. Chromium mapping is carried out with the Cr r m L 2,3 core-loss edge (575 eV). Chromium layers a few nanometers in thickness can be clearly observed. The obtained thicknesses are compared with results of X-ray reflectivity, and they show good agreement.
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Kimoto et al. (1994) studied this question.
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