Growth of textured MgO through e-beam evaporation and inclined substrate deposition

Long length textured MgO template on Hastelloy C276™ (HC) has been successfully deposited in a reel-to-reel (R2R) electron beam (e-beam) evaporation system by inclined substrate deposition (ISD). High deposition rate up to 10 nm s −1 with exposure length of 7 cm has been realized. The MgO template showed good in-plane texture of 9.5°–11.5° measured from the (002) phi scans. Experimental results reveal that MgO in-plane texture is formed by the preferred growth direction of normal and one of the MgO {200} planes rotates to the in-flux direction. A new expression, termed the 'two-thirds relationship', between the inclination angle α and the tilted angle of the (00 l ) plane from the substrate normal, β, has been summarized. YBa 2 Cu 3 O 7−δ (YBCO) film deposited by pulsed laser deposition (PLD) on strontium ruthenate (SRO) buffered ISD MgO showed T c of 91 K with transition width of 1 K. Critical current measurement indicated an I c of 110 A cm −1 at 77 K in self-field for 0.68 µm YBCO film, corresponding to a J c of 1.6 MA cm −2 .