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May 1, 1997IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Fabrication of high sensitivity ZnO thin film ultrasonic devices by electrochemical etch techniques

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CCC.C. ChangYCY.E. Chen

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Chang et al. (1997) studied this question.

synapsesocial.com/papers/6a8480b46b6022c7d8c53862https://doi.org/10.1109/58.658315
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