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April 1, 1972Applied Physics Letters

Beam Effects in the Analysis of As-Doped Silicon by Channeling Measurements

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Authors

ERE. RiminiUniversity of CataniaJHJ. D. HaskellCalifornia Institute of TechnologyJMJ. W. MayerON Semiconductor (United States)

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Rimini et al. (1972) studied this question.

synapsesocial.com/papers/6a85239a895c7e29f4c6afa4https://doi.org/10.1063/1.1654126
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