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January 1, 1975Journal of Vacuum Science and Technology

Microstructure of xenon−implanted silicon

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SMS. MaderIBM Research - Thomas J. Watson Research CenterKTK. N. TuShanghai Medical College of Fudan University

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Mader et al. (1975) studied this question.

synapsesocial.com/papers/6a853c85895c7e29f4c6b666https://doi.org/10.1116/1.568572
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