In the system both end members and the phases and have been reported to be useful transparent conductors. The present report concerns amorphous sputtered films having compositions ranging from 20 to 80 mole percent in . We have determined the properties of both as‐deposited and annealed films as functions of both film composition and sputtering conditions. From these results, the optical and electrical properties of the films have been correlated with film structure and composition. The optimum conditions for obtaining highly conductive and transparent films are described. Films having a transmission of 80%–90% in the visible and a sheet resistance of less than 5 Ω/sq can be deposited under these conditions.
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Smith et al. (1981) studied this question.
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