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By using a Van De Graaf accelerator, planar waveguides in LiNbO3, KNbO3, and BaTiO3 are fabricated (at 300 K) by thermally controlled proton implantation. The waveguide properties are investigated by dark line mode spectroscopy. The reconstructed profiles closely follow the ion concentration profiles as determined by simulation (TRIM).
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Moretti et al. (1992) studied this question.
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