The first valve-less diffuser fluid pump in silicon is presented. It consists of a planar double-chamber arrangement fabricated in a silicon wafer anodically bonded to a glass wafer. The pump uses fluid-directing diffuser - nozzle elements which have a depth of and a neck width of . The pump chamber diameter is 6 mm. Pump cavities and diffuser - nozzle elements are etched with an isotropic HNA silicon etch. Pumps with three different diffuser lengths are compared reaching a maximum pump capacity of and a maximum pump pressure of 1.7 m at a resonance frequency of 1318 Hz for methanol.
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Olsson et al. (1996) studied this question.
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