p-Channel Ge MOSFET by Selectively Heteroepitaxially Grown Ge on Si

We successfully demonstrate Ge pMOSFET integrated on Si. In this process, Ge is grown selectively on Si on patterned SiO2by heteroepitaxy, and pMOSFET is fabricated with gate dielectric stack consisting of thin GeO2and Al2O3and Al metal gate electrode. Fabricated devices show ~80% enhancement over the Si universal hole mobility. These results are promising toward monolithically integrating Ge MOSFETs with Si CMOS VLSI platform.