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Surface-enhanced Raman spectroscopy is a powerful and versatile sensing method with a detection limit down to the single molecule level, given sufficiently high signal enhancement. In this article, we demonstrate how topology optimization (TopOpt) can be used for designing surface enhanced Raman scattering (SERS) substrates adhering to realistic fabrication constraints. As an example, we experimentally demonstrated a SERS enhancement factor of 5 × 104 for the 604 cm−1 Raman line of rhodamine 6G using metal nanostructures with a critical dimension of 20 nm. We then show that, by relaxing the fabrication minimum-feature-size constraint, TopOpt may be used to design SERS substrates with orders of magnitude larger enhancement factor. The results validate topology optimization as an effective method for engineering optimized SERS nanostructures adhering to fabrication limitations.
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