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Shallow Junction Ion Implantation in Ge and Associated Defect Control, Satta, A., Simoen, E., Janssens, T., Clarysse, T., De Jaeger, B., Benedetti, A., Hoflijk, I., Brijs, B., Meuris, M., Vandervorst, W.
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Satta et al. (2006) studied this question.
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