Determination of electron density in discharge-pumped excimer laser using Stark broadening of Hβ line

The determination of the electron density in the discharge plasma used for the compact discharge-pumped rare-gas halide excimer laser of capacitor transfer type with automatic preionization was performed first by measuring the Stark half-width of the Hβ line. For the discharge-pumped XeCl laser at a total gas pressure of 2 atm and a charging voltage of 20 kV, the measured electron densities were 2.1×1015 cm−3 for Ne diluent and 1.7×1015 cm−3 for He diluent.