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The breakdown temperature Tb of electrons in SF6 gas is obtained by expressing the ionization and attachment coefficients of the gas in terms of the electron temperature Te assuming that the electron energy in the gas is in a Maxwellian distribution. The sparking criterion of the SF6 gas was obtained in terms of the gas pressure p and the anode-cathode distance d. It was found that the breakdown temperature Tb of electrons in SF6 in a high-pressure gas characterized by pd⪢0.001 is 4.9 eV, which is independent of the parameter pd. Here, pd is in units of atm cm.
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Uhm et al. (2010) studied this question.
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