Profiles of nanometric aluminum and parylene foils have been characterized by soft x-ray contact imaging using a laser-plasma source and a LiF crystal as detector. Due to the characteristic emission of this source in a 2π angle, it was possible to obtain the sample image in a wider field of view with respect to coherent sources. LiF crystal is a cheap and robust imaging detector for soft x-ray radiation, that allows one to get high spatial resolution images of thin films with thickness from hundreds down to a few tens of nanometers.
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Calegari et al. (2006) studied this question.
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