Optical modification of semiconductor surfaces through the nanoripples formation using ultrashort laser pulses: Experimental aspects

We review the studies of nanoripples formation on various semiconductor species using ultrashort pulses and different experimental conditions. We present recent studies in this field and discuss the fabrication of 2D periodic nanostructures formed on the surface of semiconductor crystals applying a method of two-beam interference of femtosecond laser. Further, we discuss the short-period ripples formation and present the studies of the semiconductors with different bandgaps potentially suitable for generation of sub wavelength nanoripples. We also show the method of formation of the nanoholes and nanodots on the surface of different semiconductors. Ripples formation using different laser parameters and ambient media is analyzed with the objective of identifying conditions of forming short-period nanoripples. Finally, we discuss the formation of extended homogeneous laser-induced periodic surface structures using few-cycle laser pulses.