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May 1, 1989Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Particle bombardment effects on thin-film deposition: A review

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DMD.M. MattoxGeorgia Institute of Technology

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D.M. Mattox (1989) studied this question.

synapsesocial.com/papers/6a86b9fc5ee22a1e35cb8e52 https://doi.org/10.1116/1.576238

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