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June 15, 1995Journal of Applied Physics

O2 rf discharge structure in parallel plates reactor at 13.56 MHz for material processing

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Authors

MSMari ShibataFujitsu (Japan)NNNobuhiko NakanoHiroshima UniversityTMToshiaki MakabeKeio University

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Cite This Study

Shibata et al. (1995) studied this question.

synapsesocial.com/papers/6a86d1b552b690c5299eaee3https://doi.org/10.1063/1.359144
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