High-efficiency soft x-ray emission spectrometer for use with synchrotron radiation excitation

A new soft x-ray spectrometer designed for use with photon excitation from synchrotron light sources is described and characterized. Special design features, including a close-spaced input slit, large toroidal gratings, and a two-dimensional charge-coupled-device array based detector system, provide exceptional measuring efficiency in a 5-m Rowland circle design. Descriptions are given of the spectrometer’s mechanical and detector design, and of calibration and alignment procedures. The beam line providing photon excitation from a synchrotron light source is described. Typical electron beam and/or photon excited emission spectra of Al, Si, and LiF are presented and compared with those produced by other instruments.