Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
September 1, 1996Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Reactive magnetron sputter deposited CNx: Effects of N2 pressure and growth temperature on film composition, bonding, and microstructure

View Full Paper
Ask AI
Bookmark
Share

Authors

WZWeitao ZhengKanazawa UniversityHSH. SjöströmLinköping UniversityIIIvan G. IvanovLinköping University

Discussion

Loading...

Member takes

Implication

Key Points

Key points are not available for this paper at this time.

Cite This Study

Zheng et al. (1996) studied this question.

synapsesocial.com/papers/6a86e616efff3bac58ca02f4https://doi.org/10.1116/1.580190
View Full Paper
Ask AI
Bookmark
Share