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January 15, 1988Journal of Applied Physics

Evaluation of crystalline quality of zirconium dioxide films on silicon by means of ion-beam channeling

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Authors

YÔYukio ÔsakaHiroshima UniversityTITakeshi ImuraHiroshima UniversityYNYoshiki NishibayashiSumitomo Electric Industries (United States)

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Ôsaka et al. (1988) studied this question.

synapsesocial.com/papers/6a86e8a0c026610cc182bbffhttps://doi.org/10.1063/1.340093
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  5. 5Channeling Studies in Diamond-Type Lattices1969 · 126 citations