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February 1, 1970Applied Physics Letters

Ion Implantation Depth Distributions: Energy Deposition Into Atomic Processes and Ion Locations

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DBD.K. BriceUnited States Department of Energy

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D.K. Brice (1970) studied this question.

synapsesocial.com/papers/6a87301da810ea404bcfaf37https://doi.org/10.1063/1.1653112
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