Integrated thin film photodetectors with vertically coupled microring resonators for chip scale spectral analysis

An integrated spectral analysis system using a thin film InGaAs metal-semiconductor-metal photodetector integrated with a vertically coupled polymer microring resonator was demonstrated for chip scale implementation. The integrated spectral analysis system has an excellent selectivity in measured spectral response as well as low dark current (3.2nA). The measured full width half maximum of the spectral photoresponse at 5V was 0.5nm.