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May 1, 1991Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Sputter deposition of precision Si/Si3N4 Bragg reflectors using multitasking interactive processing control

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Authors

DBD.I. BabicUniversity of ZagrebJDJ.J. DudleyHewlett-Packard (United States)MSMarzieh Shirazi

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Babic et al. (1991) studied this question.

synapsesocial.com/papers/6a879cd10c6f0ac874541bd2https://doi.org/10.1116/1.577586
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