Microfabrication of 3D neural probes with combined electrical and chemical interfaces

This paper reports a novel neural probe technology for the manufacture of 3D arrays of electrodes with integrated microchannels. This new technology is based on a silicon island structure and a simple folding procedure. This method simplifies the assembly or packaging process of 3D neural probes, leading to higher yield and lower cost. Prototypes with 3D arrays of electrodes have been successfully developed. Microchannels have been successfully integrated into the 3D neural probes via isotropic XeF2 gas phase etching and a parylene resealing process. The probes have been characterized by scanning electron microscopy imaging, optical imaging, impedance analysis, and atomic force microscopy characterization of the electrode surface. Preliminary animal tests have been carried out to demonstrate the recording functionality of the probes. Flow characteristics of the microchannels were also preliminarily measured.