Self‐Catalytic Growth of β‐Ga₂O₃ Nanostructures by Chemical Vapor Deposition

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In this work, we have studied the synthesis of single crystalline self‐catalyzed beta gallium oxide (β‐Ga 2 O 3 ) nanostructures by chemical vapor deposition technique. We have adopted a new approach to grow the nanostructures instead of using conventional foreign metal nano‐catalyst based‐approaches. The as‐grown nanostructures including nanowires and nanosheets (NSHs) were grown on spin‐coated Ga 2 O 3 films. The structural studies such as X‐ray diffraction, Raman and transmission electron microscope (TEM) investigations on the nanostructures showed monoclinic phase of Ga 2 O 3 and single crystalline structure. Furthermore, high‐resolution TEM with a selected area electron diffraction pattern recorded on a single β‐Ga 2 O 3 nanowire and nanosheet verified their single crystalline nature, having [001] as favorable growth direction. The energy dispersive X‐ray spectroscopy‐elemental mapping of as‐grown nanostructures indicated uniform distribution of Ga and O. Cathodoluminescence imaging and spectrum revealed excellent luminescence characteristics of nanostructures with a broad UV‐blue emission band (1.80–4.20 eV nm) centered at 2.64 eV. This study also highlights the growth mechanism of NSHs. These β‐Ga 2 O 3 nanostructures have great potential in nanofunctional devices.