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February 1, 1985Applied Physics Letters

Spatial dependence of particle light scattering in an rf silane discharge

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Authors

RRRichard M. RothKSKenneth G. SpearsGSGilbert D. Stein

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Cite This Study

Roth et al. (1985) studied this question.

synapsesocial.com/papers/6a87feb4c0c64b7dddeb3395https://doi.org/10.1063/1.95648
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