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August 15, 1984Applied Physics Letters

Laser detection of diatomic products of plasma sputtering and etching

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Authors

RWR. E. WalkupIBM (United States)Phaedon AvourisPhaedon AvourisIBM Research - Thomas J. Watson Research CenterRDR. W. DreyfusETH Zurich

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Walkup et al. (1984) studied this question.

synapsesocial.com/papers/6a87ff4da082a64c2914b5a1https://doi.org/10.1063/1.95280
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