The c -axis-oriented Pb 0.85 La 0.15 Ti 0.96 O 3 (PLT) thin films appropriate for the infrared sensor utilized in environmental monitoring were successfully obtained by rf-magnetron sputtering. The effects of sputtering conditions on the thin film growth were studied. Highly c -axis-oriented films were prepared under the most suitable sputtering conditions. Those films showed extremely large pyroelectric coefficient of 1.3×10 -7 C/cm 2 K and relatively small dielectric constant of 350 (1 kHz) at room temperature. Dielectric and ferroelectric properties of the film were also reported.
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Nagao et al. (1993) studied this question.
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