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The design and realization of a simple and reliable convertible diode/magnetron deposition system allowing the in situ production of both high-Tc superconducting oxide films and low-Tc superconducting metallic films is presented. The ability to produce high-quality double-sided in situ films with uniform characteristics over 2'' diameter targets is demonstrated. This apparatus can represent a valid alternative to more sophisticated, less flexible deposition systems and is well suited for application in the large-scale production of superconducting filters for wireless communications.
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Iavarone et al. (2000) studied this question.
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