Molybdenum phosphide films are deposited on glass from MoCl5 and 2P(C6H11)H2. The atmospheric pressure depositions are carried out at 550 and 600 °C producing silver brown shiny films. The composition of the film is shown to be MoP1.8 with a resistivity value of ca. 3800 μΩ cm. X‐ray analysis of the deposited films indicates that they are amorphous. XPS analysis revealed binding energy shifts of 228.4 eV for Mo 3d5/2 and 128.8 eV for P 2p. The deposits passed the scotch test and could not be scratched with steel or brass scalpels. They are also resistant to common solvents but dissolve in concentrated acids.
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Blackman et al. (2003) studied this question.
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