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Deflections of a He-Ne laser beam in excimer and CO2 laser-produced plumes from Kapton films were measured. They show that in addition to the existence of a shock wave observed earlier, a slower cooling wave is also developed. A model calculation is presented which explains the present experimental data as well as previous results regarding the decrease of etching efficiency with increasing ambient gas pressure.
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G. Koren (1987) studied this question.
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