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January 1, 2007Japanese Journal of Applied Physics

Characterization of High-Performance Polycrystalline Silicon Complementary Metal–Oxide–Semiconductor Circuits

Genshiro Kawachi Yoshiaki Nakazaki Hiroyuki Ogawa Masayuki Jyumonji N. Akita Masato Hiramatu Kazufumi Azuma T. Warabisako Masakiyo Matsumura

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Abstract

Characterization of High-Performance Polycrystalline Silicon Complementary Metal–Oxide–Semiconductor Circuits, Kawachi, Genshiro, Nakazaki, Yoshiaki, Ogawa, Hiroyuki, Jyumonji, Masayuki, Akita, Noritaka, Hiramatu, Masato, Azuma, Kazufumi, Warabisako, Terunori, Matsumura, Masakiyo

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Kawachi et al. (2007) studied this question.

synapsesocial.com/papers/6a8918903c66b321f60c4330 https://doi.org/10.1143/jjap.46.51

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