Scaling of dissipation in megahertz-range micromechanical diamond oscillators

The authors report frequency and dissipation scaling laws for doubly clamped diamond resonators. The device lengths range from 10to19μm corresponding to frequency and quality-factor ranges of 17to66MHz and 600–2400, respectively. The authors find that the resonance frequency scales as 1∕L2 confirming the validity of the thin-beam approximation. The dominant dissipation comes from two sources: for the shorter beams, clamping loss is the dominant dissipation mechanism, while for the longer beams, surface losses provide a significant source of dissipation. The authors compare and contrast these mechanisms with other dissipation mechanisms to describe the data.