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March 24, 1986Applied Physics Letters

Double probe model of radio frequency capacitively coupled planar discharges

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APA. M. PointuUniversité Paris-Saclay

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A. M. Pointu (1986) studied this question.

synapsesocial.com/papers/6a892f1dccf6b39be57b5a7ahttps://doi.org/10.1063/1.96713
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